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1

Nanolithography in microelectronics: A review

Journal:

Technical Physics

Year:

2011

Language:

english

File:

PDF, 1.46 MB

english, 2011

2

Prospects for the development of optical systems for nanolithography

Bel'skiĭ, A. B., Gan, M. A., Mironov, I. A., Seĭsyan, R. P.

Journal:

Journal of Optical Technology

Year:

2009

Language:

english

File:

PDF, 412 KB

english, 2009

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Extreme Ultraviolet (EUV) Lithography VI - Modeling of bi-spectral primary source for the EUV lithography

Wood, Obert R., Panning, Eric M., Zhevlakov, A. P., Seisyan, R. P., Bespalov, V. G., Elizarov, V. V., Grishkanich, A. S., Kascheev, S. V.

Year:

2015

Language:

english

File:

PDF, 1.04 MB

english, 2015

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Extreme Ultraviolet (EUV) Lithography VII - Energy effective dual-pulse bispectral laser for EUV lithography

Panning, Eric M., Goldberg, Kenneth A., Zhevlakov, A. P., Seisyan, R. P., Bespalov, V. G., Elizarov, V. V., Grishkanich, A. S., Kascheev, S. V., Sidorov, I. S.

Year:

2016

File:

PDF, 612 KB

2016

5

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Extreme Ultraviolet (EUV) Lithography VII - Energy effective dual-pulse bispectral laser for EUV lithography

Panning, Eric M., Goldberg, Kenneth A., Zhevlakov, A. P., Seisyan, R. P., Bespalov, V. G., Elizarov, V. V., Grishkanich, A. S., Kascheev, S. V., Sidorov, I. S.

Year:

2016

Language:

english

File:

PDF, 612 KB

english, 2016

6

Absorption of the laser radiation by the laser plasma with gas microjet targets

Borisevichus, D. A., Zabrodskii, V. V., Kalmykov, S. G., Sasin, M. E., Seisyan, R. P.

Journal:

Technical Physics Letters

Year:

2017

Language:

english

File:

PDF, 482 KB

english, 2017

7

Scattering of an exciton polariton by impurity centers in GaAs

D. A. Zaitsev,A. V. Kavokin,R. P. Seisyan

Journal:

Journal of Experimental and Theoretical Physics

Year:

2017

Language:

english

File:

PDF, 582 KB

english, 2017

8

Absorption Spectra of ZnSe/CdSe-Based QDs

A. D. Andreev, R. M. Datsiev, R. P. Seisyan

Journal:

physica status solidi (b)

Year:

1999

Language:

english

File:

PDF, 171 KB

english, 1999

9

Absorption and Emission of Hexagonal InN. Evidence of Narrow Fundamental Band Gap

V.Yu. Davydov, A.A. Klochikhin, R.P. Seisyan, V.V. Emtsev, S.V. Ivanov, F. Bechstedt, J. Furthmüller, H. Harima, A.V. Mudryi, J. Aderhold, O. Semchinova, J. Graul

Journal:

physica status solidi (b)

Year:

2002

Language:

english

File:

PDF, 82 KB

english, 2002

10

Exciton-Polariton Behaviour of the Absorption Edge of Thin GaAs Crystals with the “Super-Quantum” Thickness and MQW Enlarged Barriers

G. N. Aliev, N. V. Lukyanova, R. P. Seisyan, M. R. Vladimirova, H. Gibbs, G. Khitrova

Journal:

physica status solidi (a)

Year:

1997

Language:

english

File:

PDF, 209 KB

english, 1997

11

Optical and Energy Spectra of MBE-Grown Planar CdSe QD System in ZnSSe Matrix

A. D. Andreev, G. N. Aliev, R. M. Datsiev, S. V. Ivanov, I. L. Krestnikov, R. P. Seisyan

Journal:

physica status solidi (a)

Year:

1997

Language:

english

File:

PDF, 139 KB

english, 1997

12

Coulomb-Well Effects in Magnetooptical Spectra of (In, Ga)As/GaAs Multiple Quantum Well Structures

S. I. Kokhanovskii, K. Moumanis, M. E. Sasin, R. P. Seisyan, A. V. Kavokin, H. Gibbs, G. Khitrova

Journal:

physica status solidi (a)

Year:

1997

Language:

english

File:

PDF, 217 KB

english, 1997

13

Fine structure of the excitonic absorption spectra and interband magneto-optics of CdTe crystals

M.A. Abdullaev, O.S. Coschug, S.I. Kokhanovskii, R.P. Seisyan

Journal:

Journal of Crystal Growth

Year:

1990

Language:

english

File:

PDF, 484 KB

english, 1990

14

Optical properties of “pure” CdS and metal-insulator-semiconductor structures on CdS at electrical operation

M.A. Jakobson, V.D. Kagan, R.P. Seisyan, E.V. Goncharova

Journal:

Journal of Crystal Growth

Year:

1994

Language:

english

File:

PDF, 341 KB

english, 1994

15

Effects of spatial dispersion in the temperature dependence of the optical absorption in ZnSe heteroepitaxial layers and CdTe and ZnTe crystals

G.N. Aliev, R.P. Seisyan, O. Coschug-Toates

Journal:

Journal of Crystal Growth

Year:

1996

Language:

english

File:

PDF, 313 KB

english, 1996

16

Optics and magneto-optics of ZnSe heteroepitaxial layers

G.N. Aliev, R.M. Datsiev, S.V. Ivanov, P.S. Kop'ev, R.P. Seisyan, S.V. Sorokin

Journal:

Journal of Crystal Growth

Year:

1996

Language:

english

File:

PDF, 335 KB

english, 1996

17

Weak- and strong-field magnetooptics of wurtzite CdSe: parameters of quasi-cubic approximation

A.B Kapustina, B.V Petrov, A.V Rodina, R.P Seisyan

Journal:

Journal of Crystal Growth

Year:

2000

Language:

english

File:

PDF, 268 KB

english, 2000

18

Interband magneto-optics of CdSe and optical spectra of CdSe-based quantum dots

G.N. Aliev, A.D. Andreev, R.M. Datsiev, S.V. Ivanov, S.V. Sorokin, A.B. Kapustina, I.L. Krestnikov, M.E. Sasin, R.P. Seisyan

Journal:

Journal of Crystal Growth

Year:

1998

Language:

english

File:

PDF, 434 KB

english, 1998

19

“Bare” and “polaron” band parameters of ZnSe and the energy spectrum of QWs in the (Zn,Cd)Se/(Zn,Mg)SSe heterosystem

G.N. Aliev, A.D. Andreev, O. Coschug-Toates, R.M. Datsiev, S.V. Ivanov, S.V. Sorokin, R.P. Seisyan

Journal:

Journal of Crystal Growth

Year:

1998

Language:

english

File:

PDF, 463 KB

english, 1998

20

Light and heavy hole excitons in absorption and magnetoabsorption spectra of InGaAs/GaAs MQWs

Kh. Moumanis, R.P. Seisyan, S.I. Kokhanovskii, M.E. Sasin

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 211 KB

english, 2000

21

The Ground State of a Wannier-Mott Exciton in Diamond-Like Semiconductors in “Intermediate” Magnetic Fields

V. P. Dolgopolskii, R. P. Seisyan, A. L. Efros Jr.

Journal:

physica status solidi (b)

Year:

1978

Language:

english

File:

PDF, 156 KB

english, 1978

22

Diamagnetic excitons and the indium antimonide energy band parameters

Al. L. Efros, L. M. Kanskaya, S. I. Kokhanovskii, R. P. Seisyan

Journal:

physica status solidi (b)

Year:

1982

Language:

english

File:

PDF, 763 KB

english, 1982

23

Influence of Doping on Excitonic Luminescence Spectra in CdS

G. O. Müller, S. L. Karpenko, R. P. Seisyan, M. A. Yakobson

Journal:

physica status solidi (b)

Year:

1983

Language:

english

File:

PDF, 147 KB

english, 1983

24

Excitonic Electroabsorption in GaAsGaAlAs Single Quantum Well Waveguide Structures

R. P. Seisyan, A. A. Toropov, V. P. Khvostikov, T. V. Shubina

Journal:

physica status solidi (b)

Year:

1988

Language:

english

File:

PDF, 288 KB

english, 1988

25

Passive and Active Q-Switching in an AlGaAs/GaAs SQW Laser. Giant Stark Shift in the Laser p-n SQW Heterostructure

I. L. Aleiner, L. M. Chistyakova, S. I. Kokhanovskii, R. P. Seisyan, A. A. Toropov, T. V. Shubina

Journal:

physica status solidi (b)

Year:

1990

Language:

english

File:

PDF, 294 KB

english, 1990

26

Excitonic polaritons in semiconductor solid solutions AlxGa1–xAs

R. P. Seisyan, V. A. Kosobukin, S. A. Vaganov, M. A. Markosov, T. S. Shamirzaev, K. S. Zhuravlev, A. K. Bakarov, A. I. Toropov

Journal:

physica status solidi (c)

Year:

2005

Language:

english

File:

PDF, 294 KB

english, 2005

27

Tamm plasmon-polaritons: First experimental observation

M.E. Sasin, R.P. Seisyan, M.A. Kaliteevski, S. Brand, R.A. Abram, J.M. Chamberlain, I.V. Iorsh, I.A. Shelykh, A.Yu. Egorov, A.P. Vasil’ev, V.S. Mikhrin, A.V. Kavokin

Journal:

Superlattices and Microstructures

Year:

2010

Language:

english

File:

PDF, 1.08 MB

english, 2010

28

Thickness dependence of exciton absorption in pure GaAs crystals at the “prequantum” limit

G. N. Aliev, N. V. Luk’yanova, R. P. Seisyan

Journal:

Physics of the Solid State

Year:

1998

Language:

english

File:

PDF, 73 KB

english, 1998

29

Anomalous behavior of excitons at light holes in strained (In, Ga)As/GaAs heterostructures

Kh. Moumanis, R. P. Seisyan, M. É. Sasin, A. V. Kavokin, S. I. Kokhanovskii, H. M. Gibbs, G. Khitrova

Journal:

Physics of the Solid State

Year:

1998

Language:

english

File:

PDF, 70 KB

english, 1998

30

Magnetic absorption of hexagonal crystals CdSe in strong and weak fields: Quasi-cubic approximation

A. B. Kapustina, B. V. Petrov, A. V. Rodina, R. P. Seisyan

Journal:

Physics of the Solid State

Year:

2000

Language:

english

File:

PDF, 200 KB

english, 2000

31

The effect of a “Coulomb well” on the absorption and magnetoabsorption spectra of strained InGaAs/GaAs heterostructures

A. V. Kavokin, S. I. Kokhanovskii, A. I. Nesvizhkii, M. É. Sasin, R. P. Seisyan, V. M. Ustinov, A. Yu. Egorov, A. E. Zhukov, S. V. Gupalov

Journal:

Year:

1997

Language:

english

File:

PDF, 213 KB

english, 1997

32

Fano effect in the magnetoabsorption spectra of gallium arsenide

D. V. Vasilenko, N. V. Luk’yanova, R. P. Seisyan

Journal:

Year:

1999

Language:

english

File:

PDF, 91 KB

english, 1999

33

Simulation of photochemical transformations and photodarkening in photoresist films exposed to pulsed vacuum-ultraviolet radiation

N. A. Kaliteevskaya, R. P. Seisyan

Journal:

Year:

2000

Language:

english

File:

PDF, 61 KB

english, 2000

34

The ablation threshold in amorphous diamondlike carbon films exposed to an ArF excimer laser radiation

N. A. Kaliteevskaya, O. I. Kon’kov, E. I. Terukov, R. P. Seisyan

Journal:

Technical Physics Letters

Year:

2000

Language:

english

File:

PDF, 33 KB

english, 2000

35

Contrast enhancement in image transfer via interaction of UV radiation with inorganic photoresist films

N. A. Kaliteevskaya, R. P. Seisyan

Journal:

Year:

2001

Language:

english

File:

PDF, 56 KB

english, 2001

36

Photoablation of thin indium oxide films under the action of a pulsed arf excimer laser

N. A. Kaliteevskaya, R. P. Seisyan

Journal:

Technical Physics Letters

Year:

2002

Language:

english

File:

PDF, 31 KB

english, 2002

37

Extreme ultraviolet nanolithography for ULSI: A review

Journal:

Technical Physics

Year:

2005

Language:

english

File:

PDF, 321 KB

english, 2005

38

Phase transitions in thin titanium oxide films under the action of excimer laser radiation

P. Mitrev, G. Benvenuti, P. Hofman, A. Smirnov, N. Kaliteevskaya, R. Seisyan

Journal:

Technical Physics Letters

Year:

2005

Language:

english

File:

PDF, 62 KB

english, 2005

39

Above-barrier excitons: First magnetooptic investigation

M. R. Vladimirova, A. V. Kavokin, M. A. Kaliteevskii, S. I. Kokhanovskii, M. É. Sasin, R. P. Seisyan

Journal:

Year:

1999

Language:

english

File:

PDF, 111 KB

english, 1999

40

Exciton luminescence of quasi-two-dimensional solid solutions

A. Klochikhin, A. Reznitskii, L. Tenishev, S. Permogorov, S. Ivanov, S. Sorokin, Kh. Mumanis, R. Seisyan, C. Klingshirn

Journal:

Year:

2000

Language:

english

File:

PDF, 67 KB

english, 2000

41

Photocurrent in self-organized InAs quantum dots in 1.3 μm InAs/InGaAs/GaAs semiconductor laser heterostructures

A. V. Savel’ev, M. V. Maksimov, V. M. Ustinov, R. P. Seĭsyan

Journal:

Year:

2006

Language:

english

File:

PDF, 248 KB

english, 2006

42

Excitons and polaritons in AlGaAs semiconductor alloys

R. P. Seĭsyan, V. A. Kosobukin, M. S. Markosov

Journal:

Year:

2006

Language:

english

File:

PDF, 315 KB

english, 2006

43

The role of transport processes of nonequilibrium charge carriers in radiative properties of arrays of InAs/GaAs quantum dots

A. S. Shkolnik, A. V. Savelyev, L. Ya. Karachinsky, N. Yu. Gordeev, R. P. Seisyan, G. G. Zegrya, S. Pellegrini, G. S. Buller, V. P. Evtikhiev

Journal:

Year:

2008

Language:

english

File:

PDF, 242 KB

english, 2008

44

Generation of superradiation in quantum dot nanoheterostructures

A. V. Savelyev, L. Ya. Karachinsky, I. I. Novikov, N. Yu. Gordeev, R. P. Seisyan, G. G. Zegrya

Journal:

Year:

2008

Language:

english

File:

PDF, 218 KB

english, 2008

45

Width of the excitonic absorption line in AlxGa1 −xas alloys

M. S. Markosov, R. P. Seisyan

Journal:

Year:

2009

Language:

english

File:

PDF, 215 KB

english, 2009

46

Temperature-dependent excitonic absorption in long-period multiple InxGa1 −xAs/GaAs quantum well structures

S. A. Vaganov, R. P. Seisyan

Journal:

Year:

2011

Language:

english

File:

PDF, 264 KB

english, 2011

47

Thin epitaxial GaN films ablated by a pulsed KrF excimer laser

R. P. Seĭsyan, A. V. Ermakova, N. A. Kaliteevskaya, L. K. Markov, M. R. Rymalis

Journal:

Technical Physics Letters

Year:

2007

Language:

english

File:

PDF, 211 KB

english, 2007

48

Free-standing optical filters for a nanolithography source operating in the 12–15 nm wavelength range

V. P. Belik, Yu. M. Zadiranov, N. D. Il’inskaya, A. V. Korlyakov, V. V. Luchinin, M. A. Markosov, R. P. Seisyan, É. M. Sher

Journal:

Technical Physics Letters

Year:

2007

Language:

english

File:

PDF, 280 KB

english, 2007

49

Diamagnetic exciton polariton in the interband magnetooptics of semiconductors

Seisyan, R. P., Savchenko, G. M., Averkiev, N. S.

Journal:

Year:

2012

Language:

english

File:

PDF, 222 KB

english, 2012

50

Interaction of polarized light with comb-shaped metal-coated nanostructures

I. A. Slovinskii, R. P. Seisyan, M. E. Sasin, I. E. Panaiotti, M. V. Maksimov, S. O. Kognovitskii

Journal:

Technical Physics Letters

Year:

2012

Language:

english

File:

PDF, 300 KB

english, 2012